US Patent 7466429 Profiling complex surface structures using scanning interferometry
Patent 7466429 was granted and assigned to Zygo Corporation on December, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 26, 2007
Date of Patent
December 16, 2008
Patent Application Number
11768550
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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