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US Patent 7468507 Optical spot grid array scanning system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
January 25, 2006
Date of Patent
December 23, 2008
Patent Application Number
11339044
Patent Citations Received
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US Patent 12119204 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams
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US Patent 11657999 Particle beam system and method for the particle-optical examination of an object
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US Patent 11935721 System comprising a multi-beam particle microscope and method for operating the same
0
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US Patent 12094683 Method for operating a multi-beam particle beam microscope
0
Patent Inventor Names
Alon Litman
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Emanuel Elyasef
0
Nissim Elmaliach
0
Ron Naftali
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Steven R. Rogers
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Doron Meshulach
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7468507
Patent Primary Examiner
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Georgia Y Epps

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