Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masaomi Kameyama0
Date of Patent
December 30, 2008
0Patent Application Number
112305720
Date Filed
September 21, 2005
0Patent Primary Examiner
Patent abstract
This exposure system projects a pattern image onto a substrate via a projection optical system and a liquid to expose the substrate, with a space between the projection optical system and the substrate filled with the liquid. The exposure system is provided with a vaporization preventing unit for preventing the vaporization of the liquid.
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