US Patent 7471440 Fabricating micro devices using sacrificial materials
Patent 7471440 was granted and assigned to Spatial Photonics on December, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 18, 2006
Date of Patent
December 30, 2008
Patent Application Number
11407014
Patent Inventor Names
Shaoher X. Pan
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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