Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Minoru Nakano0
Date of Patent
December 30, 2008
Patent Application Number
10050101
Date Filed
January 18, 2002
Patent Primary Examiner
Patent abstract
A system for supplying a semiconductor manufacturing system control program includes an administrative server, a communications circuit connecting the administrative server to a controller of a semiconductor manufacturing system, a facility provided in the controller for determining a time when a previously installed control program can be changed, and a facility provided in the controller responsive to a result of the determination for storing a new control program received from the administrative server through the communications circuit in a memory to be executable by a processor.
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