Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoto Yoshitaka0
Shinji Koga0
Akira Nishiya0
Norihisa Koga0
Date of Patent
January 6, 2009
Patent Application Number
11213705
Date Filed
August 30, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A drain port and an exhaust port arranged at the bottom of a cup surrounding a substrate holding unit. A drainage tray is arranged below the cup so as to cover the moving area of the drain port when the substrate holding unit and the cup move in X-directions and Y-directions. An exhaust unit is arranged at a position corresponding to the position of the exhaust port of the cup when the substrate holding unit is in its spin-drying position. The exhaust unit is connected to the exhaust port to suck the interior of the cup when the spin-drying of the substrate is executed. The use of a flexible tube which is always connected to the exhaust port is no longer necessary.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
