Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 6, 2009
0Patent Application Number
113390460
Date Filed
January 24, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A micromechanical sensor and, in particular, a silicon microphone, includes a movable membrane and a counter element in which perforation openings are formed, opposite to the movable membrane via a cavity. The perforation openings are formed by slots, the width of which maximally corresponds to double the spacing defined by the cavity between the membrane and the counter element.
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