US Patent 7474454 Programmable micromirror motion control system

A multi-motion programmable micromirror control method is provided with the multiple supports in a stepper plate to upholding the micromirror structure. The control system has advantages such that multiple motion can be applied to a micromirror and that the micromirror can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the micromirror can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-motion programmable micromirror control system provides a solution to overcome the difficulties in controlling micromirror motion.