US Patent 7476289 Vacuum elastomer bonding apparatus and method
Patent 7476289 was granted and assigned to Applied Materials on January, 2009 by the United States Patent and Trademark Office.
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Patent abstract
The present invention includes a method and apparatus for bonding a sputtering target to a backing plate. In one embodiment, a sputtering target is vacuum bonded to a backing plate using an elastomeric adhesive and a metal mesh. The vacuum pulls the backing plate and sputtering target together while also removing air pockets that inevitably form within the adhesive during adhesive deposition and backing plate attachment.
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US Patent 07476289 Vacuum elastomer bonding apparatus and method US Patent 7476289 Vacuum elastomer bonding apparatus and method
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Patent Number
0747628900
Patent Number
747628900
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
074762890
Date of Patent
January 13, 2009
0Patent Application Number
114782800
Date Filed
June 29, 2006
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074762890
Date of Patent
January 13, 2009
0Patent Application Number
114782800
Date Filed
June 29, 2006
0Official Website
Patent Primary Examiner
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US Patent 07476289 Vacuum elastomer bonding apparatus and method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07476289
Date of patent
January 13, 2009
Patent application number
11478280
Date Filed
June 29, 2006
Patent primary examiner
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