Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 20, 2009
Patent Application Number
11277024
Date Filed
March 20, 2006
Patent Primary Examiner
Patent abstract
A method of manufacturing a vertical comb structure for a micro electromechanical (MEMS) device. Tooth structures are formed on a first wafer. A second wafer is then bonded to the tooth structures of the first wafer. The tooth structures are then released to form a comb structure. Forming the tooth structures on the first wafer includes using oxidation, photolithography, etching, epitaxy, and chemical and mechanical polishing to create the tooth structures on the first wafer.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
