Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yukimasa Saito0
Tomohisa Shimazu0
Toshiyuki Makiya0
Tsuyoshi Takizawa0
Hiroyuki Yamamoto0
Hisaei Osanai0
Kazuhide Hasebe0
Kenichi Yamaga0
...
Date of Patent
January 20, 2009
0Patent Application Number
114874340
Date Filed
July 17, 2006
0Patent Primary Examiner
Patent abstract
The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a heating unit provided on an inside wall of the heating-furnace body; a reaction container consisting of a single tube contained in the heating-furnace body; a gas-discharging-pipe connecting portion formed at an upper portion of the reaction container; and a first temperature controlling unit provided around the gas-discharging-pipe connecting portion.
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