Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tatsuya Ohguro0
Date of Patent
January 20, 2009
0Patent Application Number
116969390
Date Filed
April 5, 2007
0Patent Primary Examiner
Patent abstract
A MEMS includes an actuator, first and second electrodes, and a fixed shaft. The actuator is provided above a substrate. The actuator has one end and the other end. The one end of the actuator is coupled relative to the substrate. The first electrode is arranged at a position facing the second electrode. The second electrode has one end and the other end. The one end of the second electrode is coupled to the other end of the actuator. The other end of the second electrode is a free end. The fixed shaft is connected to the second electrode between the one end thereof and the other end thereof. The first electrode faces the second electrode at a portion between the fixed shaft and the other end of the second electrode.
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