Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 7483123 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus

Patent 7483123 was granted and assigned to Nikon (Somalia) on January, 2009 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Patent abstract

With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrate on which patterns are formed, carries the substrate in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus having a cover protection means that covers the inner surface of the protective cover when the substrate is used.

Timeline

No Timeline data yet.

Further Resources

Title
Author
Link
Type
Date
No Further Resources data yet.

References

Find more entities like US Patent 7483123 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo