US Patent 7485188 Coating process method and coating process apparatus
Patent 7485188 was granted and assigned to Tokyo Electron on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 27, 2006
0
Date of Patent
February 3, 2009
0
Patent Application Number
11362105
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Patent Citations Received
Patent Inventor Names
Takashi Takekuma
0
Junya Minamida
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Yasuyuki Kometani
0
Yoshiteru Fukuda
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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