Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wyatt O. Davis0
Kelly D. Linden0
Mark P. Helsel0
Randall B. Sprague0
Dean R. Brown0
Date of Patent
February 3, 2009
0Patent Application Number
109866350
Date Filed
November 12, 2004
0Patent Primary Examiner
Patent abstract
Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.
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