Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sachiko Kato0
Masanobu Ezaki0
Masashi Kobata0
Date of Patent
February 3, 2009
0Patent Application Number
118743730
Date Filed
October 18, 2007
0Patent Primary Examiner
Patent abstract
To provide titania-silica glass which is transparent glass of low thermal expansion, in particular, is of a low thermal expansion coefficient over a wide range of temperatures of 0 to 100° C. (an operating temperature range) when it is used as a photomask or a mirror material in extreme ultraviolet ray lithography, and which is excellent in homogeneity within the field and stability.
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