Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tamio Ikehashi0
Date of Patent
February 3, 2009
0Patent Application Number
114386900
Date Filed
May 23, 2006
0Patent Primary Examiner
Patent abstract
A device with a beam structure includes a substrate, an anchor and a cavity which are provided on and over the substrate, respectively, and a beam structure which is provided on the anchor and over the cavity, extends in a first direction and includes a plurality of convex portions and a plurality of concave portions, each of the convex portions having such a stress gradient as to provide a convex warp, and each of the concave portions having such a stress gradient as to provide a concave warp. The convex portions and the concave portions are alternately repeatedly arranged.
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