Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 3, 2009
Patent Application Number
11291658
Date Filed
November 30, 2005
Patent Primary Examiner
Patent abstract
A direct exposure apparatus having a light source for projecting light onto an exposure target or, more specifically, an exposure target substrate, comprises: measuring means for measuring the illuminance distribution of light on an area corresponding to the exposure surface of the exposure target substrate; and control means for controlling, based on the measurement result supplied from the measuring means, the light source so that the intended illuminance distribution can be obtained.
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