Patent attributes
A fabrication method for hollow integration rod suitable for high temperature operation, comprising the steps: (a) pre-fixing a set of mirrors to be a hollow integration rod by a light curable adhesive (such as UV curable adhesive); and (b) fixing those mirrors permanently by an inorganic adhesive. Wherein the mirrors can be a High Reflective Mirror with dielectric thin films, or it could be a High Reflective Mirror made of metallic thin film and coating a dielectric thin films by deposition for enhancing the reflection and protection purpose; for a all dielectric film, since there are multi-layer of thin dielectric films been deposited thereon, to prevent the warpage or distortion due to film stress in deposition process, several layers of thin film of silicon oxide SiOx can be pre-deposited on the backside of the mirror to balance.
