Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuri Granik0
Date of Patent
February 3, 2009
0Patent Application Number
113648020
Date Filed
February 28, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A system for calculating mask data to create a desired layout pattern on a wafer reads all or a portion of a desired layout pattern. Mask data having pixels with transmission characteristics is defined along with corresponding optimal mask data pixel transmission characteristics. An objective function is defined having one or more penalty functions that promote solutions representing a desired resolution enhancement technique. Optimization of the objective function determines the transmission characteristics of the pixels in the mask data that is used to create one or more corresponding masks or reticles.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
