US Patent 7487681 Pressure sensor adjustment using backside mask
Patent 7487681 was granted and assigned to Silicon Microstructures, Inc. on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 6, 2007
Date of Patent
February 10, 2009
Patent Application Number
11834013
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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