Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 10, 2009
Patent Application Number
10548600
Date Filed
March 18, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A fine channel device, having an inlet opening for introducing a gas and an inlet path interconnecting with this inlet opening, a fine channel interconnecting with the inlet path, a discharge path interconnecting with the fine channel, and a discharge opening interconnecting with this discharge path. The inner diameter of the inlet path is greater than that of the fine channel, and either increases gradually, or remains identical, with increasing distance from the position where the inlet opening and the inlet path are in interconnection with each other.
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