Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuji Maeda0
Sean M. Seutter0
Sunderraj Thirupapuliyur0
Thomas Mele0
Andrew M. Lam0
Jacob W. Smith0
R. Suryanarayanan Iyer0
Randhir P. Singh Thakur0
...
Date of Patent
February 10, 2009
0Patent Application Number
108859690
Date Filed
July 6, 2004
0Patent Primary Examiner
Patent abstract
An assembly comprises a multilayer nitride stack having nitride etch stop layers formed on top of one another, each of the nitride etch stop layers is formed using a film forming process. A method of making the multilayer nitride stack includes placing a substrate in a single wafer deposition chamber and thermally shocking the substrate momentarily prior to deposition. A first nitride etch stop layer is deposited over the substrate. A second nitride etch stop layer is deposited over the first nitride etch stop layer.
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