US Patent 7488933 Method for lithography model calibration
Patent 7488933 was granted and assigned to Brion Technologies on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 2, 2006
0
Date of Patent
February 10, 2009
0
Patent Application Number
11461929
0
Patent Inventor Names
Guangqing Chen
0
Yu Cao
0
Stefan Hunsche
0
Jun Ye
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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