Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 17, 2009
Patent Application Number
11241049
Date Filed
September 30, 2005
Patent Primary Examiner
Patent abstract
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
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