US Patent 7490547 Imprint lithography
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Patent Inventor Names
Aleksey Yurievich Kolesnychenko0
Helmar Van Santen0
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Patent abstract
An imprinting method is provided that, according to an embodiment, involves contacting an imprintable medium on a substrate with a template to define an imprint area in the medium, removing at least some of any imprintable medium present outside the imprint area, and separating the template from the medium.
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US Patent 07490547 Imprint lithography US Patent 7490547 Imprint lithography
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Patent Number
07490547
Patent Number
7490547
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US Patent 07490547 Imprint lithography
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Is a
Patent jurisdiction
Patent number
07490547
Date of patent
February 17, 2009
Patent application number
11025605
Date Filed
December 30, 2004
Patent primary examiner
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