Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 17, 2009
0Patent Application Number
118946290
Date Filed
July 31, 2007
0Patent Primary Examiner
Patent abstract
A MEMS apparatus having a substrate layer, a device layer and an intermediate oxide layer joining them. A slider is formed in the device layer and includes an enlarged end portion. A walled chamber having a hollow interior in which is positioned a microdetonator is formed in the substrate layer beneath the enlarged end portion and is secured to it by the oxide layer. A drive is operable to move the slider, and with it, the walled chamber, from an initial position to a final position. When in the final position an initiator is operable to initiate the microdetonator.
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