US Patent 7496422 Method for controlling a semiconductor processing apparatus

A method for controlling a batch-type semiconductor processing apparatus is provided. The method checks whether a recipe set based on basic process information is within a recipe group stored in the semiconductor processing apparatus. The method also checks whether the quantity of wafers read through lot mapping is correlated to the quantity of wafers indicated by the basic process information. During the semiconductor fabrication process, the method also checks whether a current recipe of the semiconductor processing apparatus is correlated to the set recipe.