Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shijian Li0
Steven M. Zuniga0
Fred C. Redeker0
Hung Chih Chen0
John M. White0
Ramakrishna Cheboli0
Ramin Emami0
Date of Patent
March 3, 2009
0Patent Application Number
110461890
Date Filed
January 28, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A carrier head for chemical mechanical polishing is described. The carrier head includes a backing assembly, a housing and a damping material. The backing assembly includes a substrate support surface. The housing is connectable to a drive shaft to rotate with the drive shaft about a rotation axis. In one implementation, the damping material is in a load path between the backing assembly and the housing to reduce transmission of vibrations from the backing assembly to the housing.
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