Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 3, 2009
Patent Application Number
11088075
Date Filed
March 22, 2005
Patent Primary Examiner
Patent abstract
The invention provides a method of determining at least one electrochemical characteristic of a chemical-mechanical or electrochemical-mechanical polishing system comprising application of a potential between a polishing substrate and an electrode to generate a current, and determining the at least one electrochemical characteristic by analysis of the current as a function of time.
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