Patent attributes
The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are fixed-fixed and fixed-free designs. Springs are used in the fixed-fixed design to account for dimensional changes as a result of thermal expansion. The fixed-free designs utilize a tether to prevent a cantilever arm from deforming as a result of thermal expansions, as well as reducing tight controls in the manufacture of fixed-free MEMS switches. Additionally, to prevent stiction in MEMS switches, a variegated electrode design is provided to utilize internal stresses of a suspended beam to increase the restoring force while not increasing the actuation force.
