Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tadahiro Ohmi0
Date of Patent
March 10, 2009
0Patent Application Number
105476940
Date Filed
February 27, 2004
0Patent Primary Examiner
Patent abstract
A vacuum pump, comprising a pair of screw rotors having a first screw rotor with a plurality of spiral land parts and a second screw rotor with a plurality of spiral groove parts and rotating about two axes substantially parallel with each other while engagement with each other, a casing storing the pair of screw rotors, and a pair of bearings installed on a pair of shafts (4) supporting the pair of screw rotors. The vacuum pump is characterized in that a pair of shaft seals (5) in non-contact with the pair of shafts (4) are installed between the pair of screw rotors and the pair of bearings, and each of the pair of shaft seals (5) is of a static pressure type and leads seal gas through a shaft seal portion.
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