Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
JaeSung You0
Date of Patent
March 10, 2009
Patent Application Number
11013876
Date Filed
December 17, 2004
Patent Primary Examiner
Patent abstract
A crystallization method includes providing a substrate having a silicon thin film; positioning a laser mask having first to fourth blocks on the substrate, each block having a periodic pattern including a plurality of transmitting regions and a blocking region; and crystallizing the silicon thin film by irradiating a laser beam through the laser mask. A polycrystalline silicon film crystallized by this method is substantially free from a shot mark, and has uniform crystalline characteristics.
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