Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Barrie Dudley Brewster0
Johannes Henricus Wilhelmus Jacobs0
Robert Gordon Livesey0
Date of Patent
March 10, 2009
0Patent Application Number
110919260
Date Filed
March 29, 2005
0Patent Primary Examiner
Patent abstract
A lithographic apparatus includes a patterning device for patterning a beam of radiation, a projection system for projecting the patterned beam of radiation onto a substrate, a gas purged sealing aperture extending between different zones of the apparatus, and a gas supply arrangement for supplying a mixture of at least argon and hydrogen to the sealing aperture.
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