US Patent 7502122 Fiber-optic miniature encoder for fine pitch scales
Patent 7502122 was granted and assigned to Mitutoyo on March, 2009 by the United States Patent and Trademark Office.
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An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into +/− 1st order beams, a pair of mirrors that reflect the +/− 1st order beams to converge toward the scale grating. The +/− 1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only +/− 1st order light reaches the receiver channels.
US Patent 07502122 Fiber-optic miniature encoder for fine pitch scales US Patent 7502122 Fiber-optic miniature encoder for fine pitch scales
US Patent 07502122 Fiber-optic miniature encoder for fine pitch scales
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