Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 17, 2009
Patent Application Number
11704631
Date Filed
February 9, 2007
Patent Primary Examiner
Patent abstract
The present invention provides an apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed deposition solution, and a degassed cleaning solution. The technique includes degassing the process solution before delivering the degassed process solution to a processing unit or degassing the process solution in situ, within the processing unit.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
