Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun Futakuchiya0
Naoya Kida0
Toshihiro Tachikawa0
Date of Patent
March 17, 2009
0Patent Application Number
116421550
Date Filed
December 20, 2006
0Patent Primary Examiner
Patent abstract
A substrate supporting apparatus includes a plate member of an aluminum alloy having a flat upper surface, bottomed pits formed in the plate member, and spacer members held in the pits, individually. The spacer members are sapphire spheres. The diameter of each spacer member is a little smaller than that of each pit. The upper end of each spacer member projects from the upper surface of the plate member. A spot facing is formed in a region that includes the open edge portion of the pit. A bending portion which is obtained by plastically deforming the open edge portion of the pit toward the spacer member is formed on a bottom surface of the spot facing. A V-shaped groove is formed behind the bending portion.
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