Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Harald F. Hess0
Romain Sappey0
Thomas Daniel Carr0
Date of Patent
March 17, 2009
0Patent Application Number
111308300
Date Filed
May 17, 2005
0Patent Primary Examiner
Patent abstract
In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface and a second location; generating a compensation signal from radiation reflected from a third location and a fourth location on the surface; and generating a compensated measurement signal using the uncompensated measurement signal and the compensation signal.
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