Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abdurrahman Sezginer0
Roy Prasad0
Date of Patent
March 17, 2009
0Patent Application Number
112035220
Date Filed
August 13, 2005
0Patent Primary Examiner
Patent abstract
A method of modifying polygons in a data set mask-less or mask based optical projection lithography includes: 1) mapping the data set to a figure-of-demerit; 2) moving individual polygon edges to decrease the figure-of-demerit; and 3) disrupting the set of polygons to enable a further decrease in the figure-of-demerit, wherein disrupting polygons includes any of the following polygon disruptions: breaking up, merging, or deleting polygons.
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