Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Norio Sasayama0
Date of Patent
March 24, 2009
0Patent Application Number
118455400
Date Filed
August 27, 2007
0Patent Primary Examiner
Patent abstract
When an X-ray focused by using an X-ray lens is irradiated to a sample, there is generated an X-ray halo component at the peripheral part of the focal point of the focused X-ray in the sample and, by this, precision of an analysis of a microscopic region becomes an issue. In order to control the shape of the X-rays from the X-ray lens, a collimator is installed between the X-ray lens and the sample, with an opening part having a tapering shape in which the opening at the side toward the sample is made smaller than that at the side toward the X-ray lens.
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