Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuri S. Uritsky0
Chikuang C. Wang0
Thai Cheng Chua0
Date of Patent
March 31, 2009
0Patent Application Number
114213960
Date Filed
May 31, 2006
0Patent Primary Examiner
Patent abstract
Methods and apparatus for automatically determining a feedback setpoint for use in operating an atomic force microscope (AFM) are provided. The setpoint may be determined by modulating a feedback setpoint while monitoring for a change in a detector signal. In an effort to avoid tip damage and remain in non-contact, attractive mode during use, a setpoint just above a setpoint corresponding to a detected change in a parameter of the detector signal, such as an abrupt change in phase, may be used to operate the AFM.
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