Patent attributes
The invention relates to a pressure sensor with a carrier (2), which in an inner region comprises a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged, wherein additionally at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane, wherein the first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane, and the output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
