Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark W. Miles0
Date of Patent
March 31, 2009
0Patent Application Number
115919280
Date Filed
November 2, 2006
0Patent Primary Examiner
Patent abstract
A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.
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