Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shmulik Nakash0
Date of Patent
March 31, 2009
0Patent Application Number
113639650
Date Filed
February 27, 2006
0Patent Primary Examiner
Patent abstract
An electrostatic chuck structure for holding an article is presented. The chuck structure comprises an electrically insulating chuck body layer having a first flat surface for holding the article thereon, and a second opposite surface having a honeycombed pattern in the form of an array of spaced-apart grooves. This second patterned surface of the chuck body surface for depositing thereon an electrically conductive layer (electrodes). A dielectric spacer between the electrodes and the article on the chuck body layer is defined by a portion of the chuck body layer between the grooves' bottom and the flat surface.
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