Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 7, 2009
Patent Application Number
11528785
Date Filed
September 27, 2006
Patent Primary Examiner
Patent abstract
Patterning of microelectronic and micromechanical devices is described using probes. In one example, a plurality of probe tips are driven into a processing layer of a substrate. The probe tips are carried by movable sleds. The sleds are moved to write patterns into the processing layer using the probes, and the processing layer is processed to form features on the substrate.
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