Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Horiuchi0
Kei Sato0
Date of Patent
April 7, 2009
0Patent Application Number
113985980
Date Filed
April 6, 2006
0Patent Primary Examiner
Patent abstract
A substrate carrying apparatus, comprises: a first carrying mechanism that carries a substrate into an exposure processing unit that performs exposure processing via a projection optical system and a liquid; a second carrying mechanism that carries a substrate from the exposure processing unit; and an anti-scattering mechanism that controls scattering of the liquid from at least one of the second carrying mechanism and the substrate carried by the second carrying mechanism to at least one of the first carrying mechanism and the substrate carried by the first carrying mechanism.
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