US Patent 7515685 Fluorescent X-ray analysis method and device

In a fluorescent X-ray analysis method, a sample (1) is set on a sample stage (2) on an upper side of an X-ray irradiation chamber (7) and a sample cover (6) is closed from the upper part of the sample (1) to surround the sample (1), and then, a lower plane of the sample (1) is irradiated with X-ray for analysis. When the sample (1) is set on the sample stage (2) and the sample cover (6) is closed, a cover detecting means (8) detects that the sample cover (6) is closed and X-ray is automatically projected from an X-ray source (3) to start analysis.