US Patent 7516672 Probe including pressure sensitive sensors

A probe includes a sensor having a pressure-sensitive surface, electrical signals being producible by the sensor when pressure forces are acting that have a directional component orthogonal to the pressure-sensitive surface. The probe includes a probe element, which is supported in a movable manner relative to the sensor, and a mechanical transmission element. The probe includes a diaphragm, which is arranged between the transmission element and the pressure-sensitive surface of the sensor. The probe element, the transmission element, the diaphragm and the sensor are in a mechanical operative connection such that by contacting the probe element, a change in the level of the electrical signal is producible by the sensor.