Patent attributes
An interface assembly provided at a test head, for connecting a probe card to the test head. The interface assembly includes an interface comprising an interface body and a coaxial connector supported by the interface body, and a casing for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface (20) in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card. An interface assembly provided at a test head, for connecting a probe card to the test head, the interface assembly comprising: an interface comprising an interface body and a coaxial connector supported by the interface body; and a cover member provided at the interface, for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card.
