US Patent 7518731 Interferometric MOEMS sensor

The present invention relates to an optical interferometric apparatus and method for measuring acceleration, pressure, and pressure of fluids during flow using micro-opto-electro-mechanical-systems (MOEMS). The high-sensitivity and high-resolution apparatus includes a movable mass, a stationary mass, a light source, and a photo detector. The light source emits a beam which is converted into two beam portions after impinging onto the movable and stationary masses. Interference between the beam portions are used to measure acceleration or pressure. The MOEMS structure may be integrated with a photo detector or planar waveguide. Differential amplification can be realized by employing two similar detecting structures.